ISO/TR 14999-3-2005 光学和光子学.光学元件和光学系统的干涉仪测量.第3部分:干涉仪试验设备和测量的校准和验证

标准号：ISO/TR 14999-3-2005
中文标准名称：光学和光子学.光学元件和光学系统的干涉仪测量.第3部分:干涉仪试验设备和测量的校准和验证
英文标准名称：Optics and photonics - Interferometric measurement of optical elements and optical systems - Part 3: Calibration and validation of interferometric test equipment and measurements
标准类型：N30
发布日期：1999/12/31 12:00:00
实施日期：1999/12/31 12:00:00
中国标准分类号：N30
国际标准分类号：37.020
适用范围：This part of ISO 14999 discusses sources of error and the separation of errors into symmetric andnon-symmetric parts. It also describes the reliance of measurements on the quality of a physical referencesurface and the development of test procedures capable of achieving absolute calibration.