DIN EN ISO 14644-9-2012 净化室和相关控制环境.第9部分:利用颗粒物浓度对表面洁净度的分类(ISO 14644-9-2012).德文版本EN ISO 14644-9-2012

标准号：DIN EN ISO 14644-9-2012
中文标准名称：净化室和相关控制环境.第9部分:利用颗粒物浓度对表面洁净度的分类(ISO 14644-9-2012).德文版本EN ISO 14644-9-2012
英文标准名称：Cleanrooms and associated controlled environments.Part 9: Classification of surface cleanliness by particle concentration (ISO 14644-9:2012); German version EN ISO 14644-9:2012
标准类型：C47
发布日期：1999/12/31 12:00:00
实施日期：1999/12/31 12:00:00
中国标准分类号：C47
国际标准分类号：13.040.35
引用标准：ISO 14644-6-2007
适用范围：This part of ISO 14644 establishes the classification of cleanliness levels on solid surfaces by particle concentration in cleanrooms and associated controlled environment applications. Recommendations on testing and measuring methods, as well as information about surface characteristics, are given in Annexes A to D.This part of ISO 14644 applies to all solid surfaces in cleanrooms and associated controlled environments, such as walls, ceilings, floors, working environments, tools, equipment and products. The classification of surface cleanliness by particle concentration (SCP) is limited to particles between 0,05 pm and 500μm.