DIN 50451-5-2010 半导体工艺用材料测试.液体中痕量元素测定.第5部分:在每千克微克和每千克豪微克范围之内的痕量元素测定用样品和样品制备装置的材料选择及其适用性试验指南

标准号：DIN 50451-5-2010
中文标准名称：半导体工艺用材料测试.液体中痕量元素测定.第5部分:在每千克微克和每千克豪微克范围之内的痕量元素测定用样品和样品制备装置的材料选择及其适用性试验指南
英文标准名称：Testing of materials for semiconductor technology - Determination of trace elements in liquids - Part 5: Guideline for the selection of materials and testing of their suitability for apparatus for sampling and sample preparation for the determination of t
标准类型：H80
发布日期：1999/12/31 12:00:00
实施日期：1999/12/31 12:00:00
中国标准分类号：H80
国际标准分类号：29.045
引用标准：DIN 50451-3;DIN 50451-4
适用范围：This document gives a guideline for the selection of materials and testing of their suitability for apparatus for sampling and sample preparation used for the determination of trace elements in high-purity chemical products for semiconductor technology. It is applicable for determinations of trace elements in ranges of micrograms per kilogram and nanograms per kilogram.