ISO 18516-2006 表面化学分析.俄歇电子光谱法和X射线光电子光谱法.横向分辨率测定

标准号：ISO 18516-2006
中文标准名称：表面化学分析.俄歇电子光谱法和X射线光电子光谱法.横向分辨率测定
英文标准名称：Surface chemical analysis - Auger electron spectroscopy and X-ray photoelectron spectroscopy - Determination of lateral resolution
标准类型：G04
发布日期：1999/12/31 12:00:00
实施日期：1999/12/31 12:00:00
中国标准分类号：G04
国际标准分类号：71.040.40;71.040.50
适用范围：This International Standard describes three methods for measuring the lateral resolution achievable in Augerelectron spectrometers and X-ray photoelectron spectrometers under defined settings. The straight-edgemethod is suitable for instruments where the lateral resolution is expected to be larger than 1 µm. The gridmethod is suitable if the lateral resolution is expected to be less than 1 µm but more than 20 nm. The goldislandmethod is suitable for instruments where the lateral resolution is expected to be smaller than 50 nm.Annexes A, B and C provide illustrative examples of the measurement of lateral resolution.