ISO 14606-2000 表面化学分析 溅射深度剖析 用层状膜系为参考物质的优化方法

标准号：ISO 14606-2000
中文标准名称：表面化学分析 溅射深度剖析 用层状膜系为参考物质的优化方法
英文标准名称：Surface chemical analysis - Sputter depth profiling - Optimization using layered systems as reference materials
标准类型：G04
发布日期：1999/12/31 12:00:00
实施日期：1999/12/31 12:00:00
中国标准分类号：G04
国际标准分类号：71.040.40
适用范围：This International Standard gives guidance on the optimization of sputter-depth profiling parameters using appropriate single-layered and multilayered reference materials in order to achieve optimum depth resolution as a function of instrument settings in Auger electron spectroscopy, X-ray photoelectron spectroscopy and secondary ion mass spectrometry. This International Standard is not intended to cover the use of special multilayered systems such as delta doped layers.