ISO 14644-2-2000 洁净室和相关控制环境 第2部分:与ISO 14644-1连续相配位的检测和监控规范

标准号：ISO 14644-2-2000
中文标准名称：洁净室和相关控制环境 第2部分:与ISO 14644-1连续相配位的检测和监控规范
英文标准名称：Cleanrooms and associated controlled environments - Part 2: Specifications for testing and monitoring to prove continued compliance with ISO 14644-1
标准类型：C04
发布日期：1999/12/31 12:00:00
实施日期：1999/12/31 12:00:00
中国标准分类号：C04
国际标准分类号：13.040.35
适用范围：This part of ISO 14644 specifies requirements for periodic testing of a cleanroom or clean zone to prove its continued compliance with ISO 14644-1 for the designated classification of airborne particulate cleanliness. These requirements invoke the test described in ISO 14644-1 for classification of a cleanroom or clean zone. Additional tests are also specified, to be carried out in accordance with the requirements of this part of ISO 14644. Optional tests, to be applied at the user's discretion, are also identified. This part of ISO 14644 also specifies requirements for monitoring of a cleanroom or clean zone (hereafter referred to as an installation) to provide evidence of its continued compliance with ISO 14644-1 for the designated classification of airborne particulate cleanliness.