ANSI/ASME B89.1.8-2011 位移测量激光干涉仪的性能评估

标准号：ANSI/ASME B89.1.8-2011
中文标准名称：位移测量激光干涉仪的性能评估
英文标准名称：Performance Evaluation of Displacement-Measuring Laser Interferometers
标准类型：N13
发布日期：1999/12/31 12:00:00
实施日期：1999/12/31 12:00:00
中国标准分类号：N13
国际标准分类号：17.040.30;31.260
适用范围：This standard establishes requirements and methods for the specification, evaluation, setup and use of laser interferometers. This standard will explicitly discuss only single-pass optics and a single axis of linear displacement measurement. The standard is currently limited to ionized gas laser interferometer systems. Only single-color lasers will be considered in this version of the laser standard. Single color will include both homodyne systems and heterodyne systems (see Appendix E) where operating frequencies all lie within a Doppler broadened frequency band associated with one specific atomic transition or Zeeman multiplet. Diode laser systems, chirp systems, and two-color interferometers may be included in future versions of this standard. It should be noted that the folded common path comparison technique of this standard could be used to compare any of the above systems to a standard He-Ne laser interferometer.