标准号:ASTM F2113-2001e1
中文标准名称:薄膜电子设备用高纯度金属溅涂靶杂质含量和等级的分析和报告标准指南
英文标准名称:Standard Guide for Analysis and Reporting the Impurity Content and Grade of High Purity Metallic Sputtering Targets for Electronic Thin Film Applications
标准类型:L14
发布日期:1999/12/31 12:00:00
实施日期:1999/12/31 12:00:00
中国标准分类号:L14
国际标准分类号:29.045 (Semiconducting materials)