标准号:IS 8276 Pt.1-1976
发布日期:1977/4/1 12:00:00
实施日期:1999/12/31 12:00:00
适用范围:1.1 This standard (Part I) specifies a method for the calibration of vacuum gauges in the pressure range of 10-1 to 10-5 Pa whereby a known low pres-sure is established by the passage of a known flow of gas through a circular orifice of known conductance.1.1.1 The upper limit of pressure to which the method is applicable is set by the diameter of the orifice in relation to the mean free path of the gas molecules. The lower limit will depend on the type of gauge being cali-brated, and on the amount of sorption or desorption of gas within the apparatus.