标准号:DIN50451-6-2014
英文标准名称:Testingofmaterialsforsemiconductortechnology-Determinationoftracesofelementsinliquids-Part6:Determinationof36elementsinahigh-purityammoniumfluoridesolution(NH4F)andinetchingmixturesofhigh-purityammoniumfluoridesolutioncontaininghydrofluoricacid
国际标准分类号:29.045