标准号:BS EN 62047-25-2016
英文标准名称:Semiconductor devices-Micro-electromechanical devices Silicon based MEMS fabrication technology-Measurement method of pull-press and shearing strength of micro bonding area
标准状态:A
标准类型:国际标准
发布日期:2016-11-30
国际标准分类号:31.080.99