标准号:BS EN 62374-1-2010
中文标准名称:半导体装置.依赖时间的金属层间的介质击穿(TDDB)试验
英文标准名称:Semiconductor devices. Time-dependent dielectric breakdown (TDDB) test for inter-metal layers
标准类型:L40
发布日期:2010/12/31 12:00:00
实施日期:2010/12/31 12:00:00
中国标准分类号:L40
国际标准分类号:31.080.01
适用范围:This part of IEC 62374 describes a test method, test structure and lifetime estimation methodof the time-dependent dielectric breakdown (TDDB) test for inter-metal layers applied insemiconductor devices.