标准号:BS EN 1518-1998
中文标准名称:无损检验.漏泄试验.质谱仪漏泄检测器特性
英文标准名称:Non-destructive testing - Leak testing - Characterization of mass spectrometer leak detectors
标准类型:H26
发布日期:1998/8/15 12:00:00
实施日期:1998/8/15 12:00:00
中国标准分类号:H26
国际标准分类号:19.100
适用范围:This European Standard specifies terms and procedures for the characterization of mass spectrometer leak detectors (MSLD). It is not intended to give a complete set of specifications for an acceptance test but a description of procedures that can be used without particular calibration equipment. An MSLD has an integral high vacuum system for maintaining the sensing element (mass spectrometer) at low operating pressure and for establishing a partial pressure related to the incoming gas flow. This pressure is measured quantitatively by the mass spectrometer. Such instruments are able to selectively measure the flow of a tracer gas. In most cases the tracer gas will be helium, flowing in/out of an object through a leak.
The methods described in this standard are applicable without restrictions to helium as the tracer gas. For other gases, additional precautions may be necessary. These methods are applicable to commonly-available MSLD, based on the present level of technology, which may be able to measure leak rates down to 10