ISO 13424-2013 表面化学分析.X射线光谱.薄膜分析报表

标准号：ISO 13424-2013
中文标准名称：表面化学分析.X射线光谱.薄膜分析报表
英文标准名称：Surface chemical analysis.X-ray photoelectron spectroscopy.Reporting of results of thin-film analysis
标准类型：G04
发布日期：1999/12/31 12:00:00
实施日期：1999/12/31 12:00:00
中国标准分类号：G04
国际标准分类号：71.040.40
引用标准：ISO 18115-1-2010
适用范围：This International Standard specifies the minimum amount of information required in reports of analyses of thin films on a substrate by XPS. These analyses involve measurement of the chemical composition and thickness of homogeneous thin films, and measurement of the chemical composition as a function of depth of inhomogeneous thin films by angle-resolved XPS, XPS sputter-depth profiling,peak-shape analysis, and variable photon energy XPS.