ANSI/IEST/ISO 14644-8-2006 洁净室及其相关控制环境.第8部分:空气传播分子污染物分类

标准号：ANSI/IEST/ISO 14644-8-2006
中文标准名称：洁净室及其相关控制环境.第8部分:空气传播分子污染物分类
英文标准名称：Cleanrooms and associated controlled environments - Part 8: Classification of airborne molecular contamination
标准类型：C47
发布日期：2006/11/17 12:00:00
实施日期：1999/12/31 12:00:00
中国标准分类号：C47
国际标准分类号：13.040.35
适用范围：This part of ISO 14644 covers the classification of airborne molecular contamination (AMC)in cleanrooms and associated controlled environments, in terms of airborne concentrations of specific chemical substances (individual, group or category) and provides a protocol to include test methods, analysis and time weighted factors within the specification for classification. (Full scope as presented in Standard includes additional limitations).