DIN 50989-1-2018 椭偏仪.第1部分:原理;德文和英文文本

标准号：DIN 50989-1-2018
中文标准名称：椭偏仪.第1部分:原理;德文和英文文本
英文标准名称：Ellipsometry - Part 1: Principles; Text in German and English
标准类型：N70
发布日期：1999/12/31 12:00:00
实施日期：1999/12/31 12:00:00
中国标准分类号：N70
国际标准分类号：19.100
引用标准：DIN EN ISO/IEC 17025-2005;ISO/IEC GUIDE 98-3-2008
适用范围：This standard deals with the ellipsometry, a method for determining optical and dielectric constants in the UV-VIS-NIR spectral range as well as layer thicknesses, in the range of at-line production control, quality assurance and material development.