BS ISO 16700-2004 微电子束分析.扫描电子显微镜.图像放大校准指南

标准号：BS ISO 16700-2004
中文标准名称：微电子束分析.扫描电子显微镜.图像放大校准指南
英文标准名称：Microbeam analysis - Scanning electron microscopy - Guidelines for calibrating image magnification
标准类型：N33
发布日期：2004/9/29 12:00:00
实施日期：2004/9/29 12:00:00
中国标准分类号：N33
国际标准分类号：37.020
适用范围：This International Standard specifies a method for calibrating the magnification of images generated by a scanning electron microscope (SEM) using an appropriate reference material. This method is limited to magnifications determined by the available size range of structures in the calibrating reference material. This International Standard does not apply to the dedicated critical dimension measurement SEM.