BS IEC 60748-23-3-2002 半导体器件.集成电路.混合集成电路和薄膜结构.生产线认证.生产商自审清单和报告

标准号：BS IEC 60748-23-3-2002
中文标准名称：半导体器件.集成电路.混合集成电路和薄膜结构.生产线认证.生产商自审清单和报告
英文标准名称：Semiconductor devices. Integrated circuits. Hybrid integrated circuits and film structures. Manufacturing line certification. Manufacturers' self-audit checklist and report
标准类型：L56
发布日期：2002/6/18 12:00:00
实施日期：2002/6/18 12:00:00
中国标准分类号：L56
国际标准分类号：31.200
适用范围：Applies to a high quality approval system for hybrid integrated circuits and film structures. This checklist is intended for the use of a hybrid microcircuit manufacturer's internal assessment team. It will provide the hybrid manufacturer and the National Supervising Inspectorate with ongoing information on process control demonstrating compliance with IEC 60748-23-1.