BS EN 62047-3-2006 半导体器件.微机电设备.拉伸测试的薄膜标准试样

标准号：BS EN 62047-3-2006
中文标准名称：半导体器件.微机电设备.拉伸测试的薄膜标准试样
英文标准名称：Semiconductor devices - Micro-electromechanical devices - Thin film standard test piece for tensile testing
标准类型：L33
发布日期：2006/11/30 12:00:00
实施日期：2006/11/30 12:00:00
中国标准分类号：L33
国际标准分类号：31.080.01
引用标准：ISO 17561;IEC 62047-2
适用范围：This International Standard specifies a standard test piece, which is used to guarantee thepropriety and accuracy of a tensile testing system for thin film materials with length and widthunder 1 mm and thickness under 10 μm, which are main structural materials for microelectromechanicalsystems (MEMS), micromachines and similar devices.This International Standard is based on such a concept that a tensile testing system can beguaranteed in propriety and accuracy, when the measured tensile strengths of the standardtest pieces, whose tensile strength is pre-determined, are within the designated range. It alsospecifies the test pieces to minimize characteristics deviation among the pieces.