ISO 17973-2002 表面化学分析.中分辨率螺旋电子光谱仪.元素分析用能量标度的校准

标准号：ISO 17973-2002
中文标准名称：表面化学分析.中分辨率螺旋电子光谱仪.元素分析用能量标度的校准
英文标准名称：Surface chemical analysis - Medium-resolution Auger electron spectrometers - Calibration of energy scales for elemental analysis
标准类型：N51
发布日期：1999/12/31 12:00:00
实施日期：1999/12/31 12:00:00
中国标准分类号：N51
国际标准分类号：71.040.40
适用范围：This International Standard specifies a method for calibrating the kinetic energy scales of Auger electron spectrometers with an uncertainty of 3 eV, for general analytical use in identifying elements at surfaces. In addition, it specifies a method for establishing a calibration schedule. It is applicable to instruments used in either direct or differential mode, where the resolution is less than or equal to 0,5 % and the modulation amplitude for the differential mode, if used, is 2 eV peak-to-peak. It is applicable to those spectrometers equipped with an inert gas ion gun or other method for sample cleaning and with an electron gun capable of operating at 4 keV or higher beam energy.