DIN 50451-1-2003 半导体工艺材料检验.液体中痕量元素测定.用原子吸收光谱测定法测定硝酸溶剂中银、金、钙、铜、铁、钾和钠的含量

标准号：DIN 50451-1-2003
中文标准名称：半导体工艺材料检验.液体中痕量元素测定.用原子吸收光谱测定法测定硝酸溶剂中银、金、钙、铜、铁、钾和钠的含量
英文标准名称：Testing of materials for semiconductor technology - Determination of trace elements in liquids - Part 1: Silver (Ag), gold (Au), calcium (Ca), copper (Cu), iron (Fe), potassium (K) and sodium (Na) in nitric acid by AAS
标准类型：H82
发布日期：1999/12/31 12:00:00
实施日期：1999/12/31 12:00:00
中国标准分类号：H82
国际标准分类号：29.045
适用范围：The document specifies a method for testing nitric acid for the relevant metal traces of silver, gold, copper, iron, potassium and sodium in trace quantities, for which the method of atomic absorption spectroscopy (AAS) with electrothermic atomizing is used. The range of application covers trace element mass fractions from 0,1 ng/g to 50 ng/g.