IEC 62047-3-2006 半导体器件.微机电设备.第3部分:拉伸试验的薄膜标准试验片

标准号：IEC 62047-3-2006
中文标准名称：半导体器件.微机电设备.第3部分:拉伸试验的薄膜标准试验片
英文标准名称：Semiconductor devices - Micro electromechanical devices - Part 3: Thin film standard test piece for tensile-testing
标准类型：L94
发布日期：1999/12/31 12:00:00
实施日期：1999/12/31 12:00:00
中国标准分类号：L94
国际标准分类号：31.080.01;31.080.99;31.220.01
适用范围：This International Standard specifies a standard test piece, which is used to guarantee thepropriety and accuracy of a tensile testing system for thin film materials with length and widthunder 1 mm and thickness under 10 µm, which are main structural materials for microelectromechanicalsystems (MEMS), micromachines and similar devices.This International Standard is based on such a concept that a tensile testing system can beguaranteed in propriety and accuracy, when the measured tensile strengths of the standardtest pieces, whose tensile strength is pre-determined, are within the designated range. It alsospecifies the test pieces to minimize characteristics deviation among the pieces.