ANSI/IEST/ISO 14644-3-2005 洁净室及其相关控制环境.第3部分:试验方法

标准号：ANSI/IEST/ISO 14644-3-2005
中文标准名称：洁净室及其相关控制环境.第3部分:试验方法
英文标准名称：Cleanrooms and associated controlled environments - Part 3: Test methods
标准类型：C47
发布日期：2006/3/24 12:00:00
实施日期：1999/12/31 12:00:00
中国标准分类号：C47
国际标准分类号：13.040.35
适用范围：This part of ISO 14644 specifies test methods for designated classification of airborne particulate cleanliness and for characterizing the performance of cleanrooms and clean zones. Performance tests are specified for two types of cleanrooms and clean zones: those with unidirectional flow and those with non-unidirectional flow, in three possible occupancy states: as-built, at-rest and operational. The test methods recommend test apparatus and test procedures for determining performance parameters.