ISO/TR 15969-2001 表面化学分析 深度描述 溅射深度测量

标准号：ISO/TR 15969-2001
中文标准名称：表面化学分析 深度描述 溅射深度测量
英文标准名称：Surface chemical analysis - Depth profiling - Measurement of sputtered depth
标准类型：G04
发布日期：1999/12/31 12:00:00
实施日期：1999/12/31 12:00:00
中国标准分类号：G04
国际标准分类号：71.040.40
适用范围：This Technical Report gives guidelines for measuring the sputtered depth in sputtered depth profiling. The methods of sputtered depth measurement described in this Technical Report are applicable to techniques of surface chemical analysis when used in combination with ion bombardment for the removal of a part of a solid sample to a typical sputtered depth of up to several micrometres.