BS EN 62047-6-2010 半导体装置.微机电装置.薄膜材料的轴向疲劳试验方法

标准号：BS EN 62047-6-2010
中文标准名称：半导体装置.微机电装置.薄膜材料的轴向疲劳试验方法
英文标准名称：Semiconductor devices - Micro-electromechanical devices - Axial fatigue testing methods of thin film materials
标准类型：K24
发布日期：2010/4/30 12:00:00
实施日期：2010/4/30 12:00:00
中国标准分类号：K24
国际标准分类号：31.080.99
适用范围：This International Standard specifies the method for axial tensile–tensile force fatigue testingof thin film materials with a length and width under 1 mm and a thickness in the rangebetween 0,1 μm and 10 μm under constant force range or constant displacement range. Thinfilms are used as main structural materials for MEMS and micromachines.The main structural materials for MEMS, micromachines, etc., have special features, such astypical dimensions of a few microns, material fabrication by deposition, and test piecefabrication by means of non-mechanical machining, including photolithography. ThisInternational Standard specifies the axial force fatigue testing methods for micro-sized smoothspecimens, which enables a guarantee of accuracy corresponding to the special features. Thetests are carried out at room temperatures, in air, with loading applied to the test piece alongthe longitudinal axis.