ANSI/IEST/ISO 14644-5-2004 洁净室和相关控制环境.第5部分:操作

标准号：ANSI/IEST/ISO 14644-5-2004
中文标准名称：洁净室和相关控制环境.第5部分:操作
英文标准名称：Cleanrooms and associated controlled environments-Part 5: Operations
标准类型：C47
发布日期：2006/2/28 12:00:00
实施日期：1999/12/31 12:00:00
中国标准分类号：C47
国际标准分类号：13.040.35
适用范围：This part of ISO 14644 specifies basic requirements for cleanroom operations. It is intended for those planning to use and operate a cleanroom. Aspects of safety that have no direct bearing on contamination control are not considered in this part of ISO 14644 and national and local safety regulations must be observed. This document considers all classes of cleanrooms used to produce all types of products. Therefore, it is broad in application and does not address specific requirements for individual industries. Methods and programmes for routine monitoring within cleanrooms are not covered in detail in this part of ISO 14644 but reference is made to ISO 14644-2 and ISO 14644-3 for monitoring particles and ISO 14698-1 and ISO 14698-2 for monitoring micro-organisms.