ISO 14644-3-2005 洁净室和相关控制环境.第3部分:试验方法

标准号：ISO 14644-3-2005
中文标准名称：洁净室和相关控制环境.第3部分:试验方法
英文标准名称：Cleanrooms and associated controlled environments - Part 3: Test methods
标准类型：C04;C47
发布日期：1999/12/31 12:00:00
实施日期：1999/12/31 12:00:00
中国标准分类号：C04;C47
国际标准分类号：13.040.35
适用范围：This part of ISO 14644 specifies test methods for designated classification of airborne particulate cleanlinessand for characterizing the performance of cleanrooms and clean zones. Performance tests are specified fortwo types of cleanrooms and clean zones: those with unidirectional flow and those with non-unidirectional flow,in three possible occupancy states: as-built, at-rest and operational. The test methods recommend testapparatus and test procedures for determining performance parameters. Where the test method is affected bythe type of cleanroom or clean zone, alternative procedures are suggested. For some of the tests, severaldifferent methods and apparatus are recommended to accommodate different end-use considerations.Alternative methods not included in this part of ISO 14644 may be used if based on agreement betweencustomer and supplier. Alternative methods do not necessarily provide equivalent measurements.This part of ISO 14644 is not applicable to the measurement of products or of processes in cleanrooms orseparative devices.