ISO 18114-2003 表面化学分析.次级离子质谱法.测定离子注入标样中的相对灵敏度系数

标准号：ISO 18114-2003
中文标准名称：表面化学分析.次级离子质谱法.测定离子注入标样中的相对灵敏度系数
英文标准名称：Surface chemical analysis - Secondary-ion mass spectrometry - Determination of relative sensitivity factors from ion-implanted reference materials
标准类型：G04
发布日期：1999/12/31 12:00:00
实施日期：1999/12/31 12:00:00
中国标准分类号：G04
国际标准分类号：71.040.40
适用范围：This International Standard specifies a method of determining relative sensitivity factors (RSFs) for secondary-ion mass spectrometry (SIMS) from ion-implanted reference materials. The method is applicable to specimens in which the matrix is of uniform chemical composition, and in which the peak concentration of the implanted species does not exceed one atomic percent.