BS ISO 20341-2003 表面化学分析.次级离子质谱法.多δ层标准材料深度溶解参数的估算方法

标准号：BS ISO 20341-2003
中文标准名称：表面化学分析.次级离子质谱法.多δ层标准材料深度溶解参数的估算方法
英文标准名称：Surface chemical analysis - Secondary-ion mass spectrometry - Method for estimating depth resolution parameters with multiple delta-layer reference materials
标准类型：G04
发布日期：2003/8/8 12:00:00
实施日期：2003/8/8 12:00:00
中国标准分类号：G04
国际标准分类号：71.040.50
适用范围：1 This International Standard specifies procedures for estimating three depth resolution parameters, viz the leading-edge decay length, the trailing-edge decay length and the Gaussian broadening, in SIMS depth profiling using multiple delta-layer reference materials. 2 This International Standard is not applicable to delta-layers where the chemical and physical state of the near-surface region, modified by the incident primary ions, is not in the steady state.