DIN EN ISO 10692-2-2003 储气瓶.微电子工业用储气瓶阀接头.第2部分:储气瓶阀接头规范和型式试验
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标准号:DIN EN ISO 10692-2-2003
中文标准名称:储气瓶.微电子工业用储气瓶阀接头.第2部分:储气瓶阀接头规范和型式试验
英文标准名称:Gas cylinders - Gas cylinder valve connections for use in the microelectronic industry - Part 2: Specification and type testing for valve to cylinder connections (ISO 10692-2:2001); German version EN ISO 10692-2:2001
标准类型:J74
发布日期:1999/12/31 12:00:00
实施日期:2003/4/1 12:00:00
中国标准分类号:J74
国际标准分类号:23.060.40
适用范围:The document specifies a test sequence and acceptability criteria for connections between gas cylinders and valves for gases and gas mixtures used under special conditions of service where the highest levels of cleanliness and/or freedom from particles are demanded for e.g. the manufacturing of microelectronic components. It specifies a mandatory type test programme to ensure the safety of the valve to cylinder connection. Additional tests recommended for assessment of durability and other operational features of the connection are given in annex A.
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