IEC 60749-27-2006 半导体器件.机械和气候试验方法.第27部分:静电放电(ESD)灵敏度测试.机器模型(MM)

标准号：IEC 60749-27-2006
中文标准名称：半导体器件.机械和气候试验方法.第27部分:静电放电(ESD)灵敏度测试.机器模型(MM)
英文标准名称：Semiconductor devices - Mechanical and climatic test methods - Part 27: Electrostatic discharge (ESD) sensitivity testing - Machine model (MM)
标准类型：L40
发布日期：1999/12/31 12:00:00
实施日期：1999/12/31 12:00:00
中国标准分类号：L40
国际标准分类号：31.080.01
适用范围：This part of IEC 60749 establishes a standard procedure for testing and classifyingsemiconductor devices according to their susceptibility to damage or degradation by exposureto a defined machine model (MM) electrostatic discharge (ESD). It may be used as analternative test method to the human body model ESD test method. The objective is toprovide reliable, repeatable ESD test results so that accurate classifications can be performed.This test method is applicable to all semiconductor devices and is classified as destructive.ESD testing of semiconductor devices is selected from this test method, the human bodymodel (HBM – see IEC 60749-26) or other test methods in the IEC 60749 series. The MM andHBM test methods produce similar but not identical results. Unless otherwise specified, theHBM test method is the one selected.NOTE 1 This test method does not truly simulate discharge from real machines or metallic tools because the testmethod uses high parasitic inductance of the test circuit, whereas real machines and metallic tools, whosedischarge rise time is approximately 100 ps, have no inductance.NOTE 2 Certain clauses in this test method are in accordance with IEC 61340-3-2.