BS EN 60204-33-2011 机械安全.机械的电气设备.半导体制造设备要求

标准号：BS EN 60204-33-2011
中文标准名称：机械安全.机械的电气设备.半导体制造设备要求
英文标准名称：Safety of machinery. Electrical equipment of machines. Requirements for semiconductor fabrication equipment
标准类型：C68
发布日期：2011/8/31 12:00:00
实施日期：2011/8/31 12:00:00
中国标准分类号：C68
国际标准分类号：13.110;25.040.30;29.020
引用标准：IEC 60034-11-2004;IEC 60038;IEC 60073-2002;IEC 60364-4-41-2005;IEC 60364-4-43-2008;IEC 60364-6-2006;IEC 60417;IEC 60445-2006;IEC 60446-2007;IEC 60447-2004;IEC 60529-1989;IEC 60617;IEC 60695-11-10-1999;IEC 60950-1-2005;IEC 61010-1-2001;IEC 61032-1997;IEC 6
适用范围：This part of IEC 60204 applies to electrical and electronic equipment associated withsemiconductor fabrication equipment for the manufacture, measurement, assembly, and test ofsemiconductors.NOTE 1 In this standard, the term electrical includes electrical, electronic, and programmable electronic matters(i.e. electrical equipment means electrical, electronic, and programmable electronic equipment).NOTE 2 In the context of this standard, the term person refers to any individual and includes those persons whoare assigned and instructed by the user or his agent(s) in the installation, use, and care of the fabricationequipment in question.The electrical equipment covered by this standard commences at the point of connection of thesupply to the electrical equipment (see 5.1), and includes proper instruction for its safeinstallation.NOTE 3 For the requirements for the electrical supply installation in buildings, see IEC 60364 series.This part is applicable to the electrical equipment or parts of the electrical equipment thatoperate with nominal supply voltages not exceeding 1 000 V for alternating current (a.c.) andnot exceeding 1 500 V for direct current (d.c.), and with nominal supply frequencies notexceeding 200 Hz. For higher voltages or frequencies, special requirements may be needed.NOTE 4 Electrical equipment within which derived voltages exceed these supply voltage limits is within the scopeof this standard.Included are requirements for protective measures against electrical safety hazards as well aselectrical interlock circuits that protect against non-electrical hazards. However, it does notcover all the requirements that are needed or required by other standards or regulations inorder to safeguard persons from hazards other than electrical hazards (e.g. chemical hazards,mechanical hazards, radiation hazards). Each type of machine has unique requirements to beaccommodated to provide adequate safety.Additional and special requirements can apply to the electrical equipment of fabricationequipment that:• use, process, or produce potentially explosive material;• are used in potentially explosive and/or flammable atmospheres;• have special risks when producing or using certain materials;• are hoisting machines (which are covered by IEC 60204-32).This standard does not include specifications for performance or functional characteristics ofthe fabrication equipment.This standard does not deal with the possible effects on human health that can result fromemissions (for example EMFs, noise) from the fabrication equipment.This standard does not specify requirements for electromagnetic compatibility (EMC).