BS EN 62047-2-2006 半导体器件.微型机电器件.薄膜材料的拉伸试验方法

标准号：BS EN 62047-2-2006
中文标准名称：半导体器件.微型机电器件.薄膜材料的拉伸试验方法
英文标准名称：Semiconductor devices - Micro-electromechanical devices - Part 2: Tensile testing method of thin film materials
标准类型：L40
发布日期：2006/11/30 12:00:00
实施日期：2006/11/30 12:00:00
中国标准分类号：L40
国际标准分类号：31.080.01;31.080.99
引用标准：ISO 6892
适用范围：This International Standard specifies the method for tensile testing of thin film materials with length and width under 1 mm and thickness under 10 μm, which are main structural materials for micro-electromechanical systems (MEMS), micromachines and similar devices.The main structural materials for MEMS, micromachines and similar devices have special features such as typical dimensions in the order of a few microns, a material fabrication by deposition, and a test piece fabrication by non-mechanical machining using etching andphotolithography. This International Standard specifies the testing method, which enables a guarantee of accuracy corresponding to the special features.